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xr66系列
model features
name ：regulator for semiconductor industry
model no.：
model no.：
overview：
this compact sized regulator is designed for semiconductor production equipment.
feature：
realizing a large flow rate of 10 l/min;
the contact gas part is finished with ultra clean (uc) treatment;
the contact gas part has no leak and no particles will be made.
the contact gas part is finished with ultra clean (uc) treatment;
the contact gas part has no leak and no particles will be made.