product center
xr56系列
model features
name ：regulator for semiconductor industry
model no.：xr56 series
model no.：xr56 series
overview：
this is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry
feature：
this regulator is designed in small size for miniaturization;
assembly, adjustment, inspection and packaging are performed in a clean room to minimize the number of particles.
for monitoring the outlet pressure, pressure gauge can be installed.
assembly, adjustment, inspection and packaging are performed in a clean room to minimize the number of particles.
for monitoring the outlet pressure, pressure gauge can be installed.